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Poids de l’Open access dans la production CNRS

Titre
Plasma characterization in reactive sputtering processes of Ti in Ar/O-2 mixtures operated in metal, transition and poisoned modes: a comparison between direct current and high-power impulse magnetron discharges
BSO - Titre
Plasma characterization in reactive sputtering processes of Ti in Ar/O2 mixtures operated in metal, transition and poisoned modes: a comparison between direct current and high-power impulse magnetron discharges
DOI
DOAI
Identifiant WoS
WOS:000412110100001
Accès ouvert
OA - Non
Source - Accès ouvert
OA - Non
Type d'accès
Non OA
Editeur

Springer

Source

EUROPEAN PHYSICAL JOURNAL D

ISSN
1434-6060
Type de document
  • Article
Notoriété
2 - Acceptable
CNRS
Oui
CNRS - Institut
  • INSIS - Institut des sciences de l'ingénierie et des systèmes
uid:/015SCP5M
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