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Titre
Study of surface reaction during selective epitaxy growth of silicon by thermodynamic analysis and density functional theory calculation
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BSO - Titre
Study of surface reaction during selective epitaxy growth of silicon by thermodynamic analysis and density functional theory calculation
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DOI
DOI
10.1016/j.jcrysgro.2017.01.006
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DOAI
DOAI
10.1016/j.jcrysgro.2017.01.006
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Identifiant WoS
WOS:000404750000060
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Accès ouvert
OA - Non
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Source - Accès ouvert
OA - Non
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Type d'accès
Non OA
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Editeur
Elsevier
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Source
JOURNAL OF CRYSTAL GROWTH
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ISSN
0022-0248
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Type de document
Article
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Notoriété
2 - Acceptable
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CNRS
Oui
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CNRS - Institut
INC - Institut de chimie
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uid:/35DGD4Z1
12/10/2021 14:52:46 (latest)
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