Poids de l’Open access dans la production CNRS
Home
Resources
Graphs
Search
Export
Sign in
Titre
Study of tungsten films deposited by DC sputtering dedicated to integrated heaters
XX
BSO - Titre
Study of tungsten films deposited by DC sputtering dedicated to integrated heaters
XX
DOI
DOI
10.1116/1.4981786
XX
DOAI
DOAI
10.1116/1.4981786
XX
Identifiant WoS
WOS:000402053900009
XX
Accès ouvert
OA - Non
XX
Source - Accès ouvert
OA - Non
XX
Type d'accès
Non OA
XX
Editeur
American Vacuum Society
XX
Source
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
XX
ISSN
1071-1023
XX
Type de document
Article
XX
Notoriété
2 - Acceptable
XX
CNRS
Oui
XX
CNRS - Institut
INC - Institut de chimie
XX
uid:/3QBQJX9D
12/10/2021 14:52:43 (latest)
Add field
Share/Export
Powered by
Lodex
9.6.0
