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Titre
Incorporation of the Organic Additives During the Damascene or TSV Process: Influence of the Applied Waveform
BSO - Titre
Incorporation of the Organic Additives during the Damascene or TSV Process: Influence of the Applied Waveform
Identifiant WoS
WOS:000406883200014
Accès ouvert
OA - Non
Source - Accès ouvert
OA - Non
Type d'accès
Non OA
Editeur

The Electrochemical Society

Source

SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS 7

ISSN
1938-5862
Type de document
  • Meeting Abstract
Notoriété
0 - Sans notoriété
CNRS
Oui
CNRS - Institut
  • INC - Institut de chimie
  • INP - Institut de physique
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