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Titre
Critical dimension metrology of a plasmonic photonic crystal based on Mueller matrix ellipsometry and the reduced Rayleigh equation
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BSO - Titre
Critical dimension metrology of a plasmonic photonic crystal based on Mueller matrix ellipsometry and the reduced Rayleigh equation
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DOI
DOI
10.1364/ol.42.002631
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DOAI
DOAI
10.1364/ol.42.002631
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Identifiant WoS
WOS:000404743500058
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Accès ouvert
OA - Non
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Source - Accès ouvert
OA - Non
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Type d'accès
Non OA
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Editeur
The Optical Society
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Source
OPTICS LETTERS
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ISSN
0146-9592
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Type de document
Article
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Notoriété
4 - Excellente
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CNRS
Oui
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CNRS - Institut
INP - Institut de physique
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uid:/QF91WDZ7
12/10/2021 14:52:46 (latest)
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